The application of the grazing-incidence small-angle X-ray scattering (GISAXS) technique\nfor the investigation of three-dimensional lattices of nanostructures is demonstrated. A successful\nanalysis of three-dimensionally ordered nanostructures requires applying a suitable model for the\ndescription of the nanostructure ordering. Otherwise, it is possible to get a good agreement between\nthe experimental and the simulated data, but the parameters obtained by fitting may be completely\nincorrect. In this paper, we theoretically examine systems having different types of nanostructure\nordering, and we show how the choice of the correct model for the description of ordering influences\nthe analysis results. Several theoretical models are compared in order to show how to use GISAXS\nin the investigation of self-assembled arrays of nanoparticles, and also in arrays of nanostructures\nobtained by ion-beam treatment of thin films or surfaces. All models are supported by experimental\ndata, and the possibilities and limitations of GISAXS for the determination of material structure\nare discussed.
Loading....